CNS Technologies - Chuyên môn xuất nhập khẩu với Công nghệ
Mô tả sản phẩm
Cleanroom Compatible for High Ion Output for Fast Neutralization
Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Interface Module Model 5200-IM6T
Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.
TARGET MARKETS
- Back-End Semiconductor Processing
- Front-End Semiconductor Manufacturing
TARGET APPLICATIONS
The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.
AeroBar® 5225 Critical Environment Ionizer
Thông số kỹ thuật
AeroBar 5225
Voltage
Input: 24 VAC, 50/60 Hz, 1W (typ); powered by Interface Module Model 5200-IM6T
Output: 0-20 kVDC, ±10% for each polarity on an individual AeroBar; positive or negative output levels can be adjusted separately through GUI
Ion Emission
Pulsed DC, Steady-state DC, or Standby
Emitter
Single-crystal Silicon, replaceable
Cleanroom Class
ISO 14644-1 Class 1 (Single-crystal Silicon emitter)
ISO 14644-1 Class 3 (Titanium emitter)
Dimension
2.1”H x 1.2”W x 22.4 / 28.4 / 35.7 / 44.4 / 55.6 / 64.4 / 75.5 / 84.4”L (5.3 x 3.1 x 56.9 / 72.1 / 90.7 / 112.8 / 141.2, 163.6 / 191.8 / 214.4 cm)
Weight
1.13 lb (0.51 kg) for a 22” (55.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30.5 cm)
Interface Module Model 5200-IM6T
Input Voltage
24 VDC, 1.0A, ±5%
Capacity
Connect to up to six Model 5225 AeroBars
LED Indicator
Green POWER ON, yellow COMMUNICATION, red ALARM
Dimension
2.76”H x 2.88”W x 12.4”L (7.01 x 7.32 x 31.5 cm) with flange
Weight
2.6 lb (1.18 kg)