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Steady-State DC Ion Emission with Intrinsically Balanced Ionization

Simco-Ion’s AeroBar Ionizer Model 5685 is designed to control static charge in mini-environments, laminar flow hoods, and workstations. The Model 5685 features a unique aerodynamic design that ionizes a local area without disrupting the laminar flow. Ideal in 12-24 inch distance applications with laminar air flow, the Model 5685 utilizes Steady-State DC ion emission and Simco-Ion’s IsoStat® Technology. IsoStat technology guarantees intrinsically balanced ionization. No complicated feedback circuits are required to maintain balance, and adjustment is never needed.

  • IsoStat® technology
  • Steady-state DC ion emission for high ion density
  • Single-crystal silicon or titanium emitter points
  • Multiple lengths, including short 11-inch AeroBars

TARGET MARKETS

  • Back-End Semiconductor Processing
  • Front-End Semiconductor Manufacturing

TARGET APPLICATIONS

The AeroBar 5685 is designed to control electrostatic discharge and particle contamination in mini-environments in locations where forced-air is not favored such as a wafer handler station.

Model 5685 air ionizer wafer handler installation application

The AeroBar 5685 is designed to control electrostatic discharge and particle contamination in mini-environments such as a wafer inspection areas.

Model 5685 air ionizer wafer inspection installation application

 

AeroBar® 5685 In-tool SSDC Ionizer

Thông số kỹ thuật

Voltage Input: 24 VAC (±10%), 50-60 Hz, 3.5W (max) Output: 7.5 kV (typ)
Discharge 25 sec or less for ±1000V to ±100V discharge @ 24” with min 60 fpm airflow
Balance ±50V @ 24” (61.0 cm) measured directly below two opposite polarity emitter points (Model 5685 must be mounted at least 6” (15.2 cm) away from grounded surfaces for optimum balance performance)
Ion Emission Steady-state and IsoStat Technology
Emitter Titanium or Single-crystal Silicon
Cleanroom Class ISO 14644-1 Class 3
Dimension 2.07”H x 1.16”W x 11.4 / 22.4 / 44.4 / 64.4”L (52.6 x 29.5 x 29.0 / 56.9 / 112.8 / 163.6 cm)
Weight 0.56 lb per foot of bar length (0.256 kg per 30.5 cm)

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