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Closed-loop Ionizer Controllers for Multichannel Voltage Detection with ESD Event Detection Option

Simco-Ion’s Novx brand of Passive and Active Multi-fan Closed-loop Ionizer Controllers provide the capability to simultaneously detect, measure, record and monitor electrostatic voltages in multiple locations. The versatile antennas used with these systems allow their use in a variety of applications including monitoring sensitive workstations, in-tool voltages, or ionizer performance with the option of closed-loop control to select ionizer products.

TARGET MARKETS

  • Electronics Manufacturing
  • Life Sciences
  • Back-end Semiconductor Processing
  • Front-end Semiconductor Processing
  • Flat-panel Display

TARGET APPLICATIONS

Novx 3352 and 3362 enables field voltage detection in both front-end and back-end semiconductor manufacturing environments. The versatile antennas used with these systems allow their use in a variety of FPD, disk-drive and medical applications including monitoring sensitive work stations, in-tool voltages, or ionizer performance with the option of closed-loop control to select ionizer products.

 

Tính năng và lợi ích

  • Digital, microprocessor-based controllers, multichannel, digital I/O, auxiliary I/O, local addressability, RS-485/Modbus or Ethernet data output
  • Passive (unpowered) and active antenna configurations
  • Precision resolution
  • Programmable closed-loop control for up to 3 solid state DC ionizer fans or a 3-fan blower
  • Programmable alarm set-points with tool shutdown option
  • Voltage/polarity displays, local red/green LEDs each channel

Novx 3352 & 3362 | Field Voltage Detection

Thông số kỹ thuật

Novx 3352
Capacity 1, 2 or 3 fans
Reporting Range 0 to ±500V
Accuracy 0.5V for <20V; ±5% for >20V
Decay Testing No
Dimension 2W x 6.8D x 6.5 H in. (5.1W x 17.3D x 16.5H cm)
Weight 2.1 lb (0.95 kg)
Novx 3362
Capacity 1, 2 or 3 fans
Reporting Range 0 to ±150V
Accuracy 1V for <20V; ±5% for >20V
Decay Testing Yes
Dimension 2W x 6.8D x 6.5 H in. (5.1W x 17.3D x 16.5H cm)
Weight 2.2 lb (1 kg)

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