Modulated Pulse AeroBar® with Feedback Control

Simco-Ion’s latest Modulated Pulse (MP) Technology ionization bar is now available with active monitoring and feedback control through the Novx System and Novx Inside versions. The 5645 MP bar is designed to provide industry-leading balanced ionization performance for semiconductor back-end advanced packaging and test applications and front-end demanding ultra-clean applications for fast discharge time, low swing voltages, and precision balance. This advanced technology enables AeroBar mounting within 150 mm of the wafer. Precision adjustment combined with ultra-clean silicon emitter points, the 5645 MP bar exceeds ISO 14644-1 Class 1 cleanliness and meets the Extended ISO Class 1 level for particles down to 10 nm. 

When installed with Novx System or Novx Inside, monitoring and feedback control, the 5645 can maintain precise balance better than ±5V. The bar can easily adjust and fine-tune voltage, frequency, and balance to meet environmental and product sensitivity requirements. Model 5645 MP bar is available in 14 lengths, from 350-2350 mm.

• ±5V with Novx monitoring and feedback system

• Silicon-crystal: ISO 14644-1 Class 1 and Extended ISO Class 1
  Titanium: ISO 14644-1 Class 3 

• Centralize power and control with widely adjustable MP Control Software

• Sensor input, FMS connection, alarms, power, and communications are located on the same end of the bar

TARGET APPLICATIONS

Semiconductor back-end manufacturing processes

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