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Introduce
Static Charge Control Ionizer with Air Assist Cartridge Design with Cross-channel Air Delivery
Simco-Ion’s QuadBar™ Ionizer with Air Assist Model 4635 provides effective static ontrol in a small format. The Model 4635 offers two air assist cartridge design options. Each utilizes a cross-channel air cartridge built around the emitter points that provides optimal air distribution with minimal field voltage.
Controller Model 4030
Simco-Ion Model 4030 QuadBar Controller is a convenient solution for powering and monitoring up to 16 QuadBars and 2 AeroBar Model 5685 ionizers for optional AeroBar ionization.
TARGET MARKETS
- Back-End Semiconductor Processing
- Front-End Semiconductor Manufacturing
TARGET APPLICATIONS
QuadBar Model 4635 Ionizers placed above and below the handling robot accelerate discharge times on the front and back wafer surfaces, regardless of airflow.
Features and Benefits
- Air assist cartridge design with cross-channel air delivery
- Two cartridge design options offers extended cleaning periods (standard with sheath air flow) or faster discharge times (jet with center orifice)
- Rotatable cartridge design
- Quadropole configuration with IsoStat technology
- Compact size
- Single Crystal Silicon emitter points
- Alarm output to FMS or process tool controller
QuadBar™ 4635 | Static Control Ionizer with Air-Assist
Specifications
Input Voltage
24 VAC ±5% @ 0.10A, 50/60 Hz, 2.4W; 24 VDC ±5% @ 0.025A, 0.6W (typ)
Discharge
Standard Cartridge: <15 sec @ 12” (30.5 cm) directly under emitter points with 15 lpm (min) purging gas airflow
Jet Cartridge: <6 sec @ 12” (30.5 cm) directly under emitter points with 15 lpm (min) purging gas airflow
Balance
±50V @ 6” & 12” (15.2 & 30.5 cm) directly under the emitter points
Ion Emissions
Steady-state DC Technology
Cleanroom Class
ISO 14644-1 Class 1 when powered with 24 VDC
ISO Class 2 when powered with 24 VAC with 33-1421-01 transformer or Model 4030 Controller
Coverage
12” x 12”
Dimension
1.3”H x 1.3”W x 4.5”L (3.3 x 3.3 x 11.4 cm) air connection elbow on the side, width 1.92” (4.88 cm) air connection elbow on the end, ionizer body length 3.9” (10 cm)
Weight
0.24 lb (0.11 kg)