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Introduce
In-tool Micro Blower
Simco-Ion’s Micro Series Blowers are designed for advanced critical environment in-tool applications where space is a constraint. The new 5941 Micro Blower is compactly designed but exceptionally effective in meeting current requirements for advanced automated process tools. Only 4.33” (110 mm) tall and 3.15” (80 mm) wide, this amazing compact in-tool blower offers outstanding performance in back-end semiconductor environments.
- ±3V or better balance
- Compact size
- Cleanliness rated at ISO 14644-1 Class 5
- Facility Monitoring System (FMS) connection
- Auto-clean system
Model 5941 In-tool Micro Ionizing Blower
Specifications
Input Voltage
24 VDC (±10%), 6W max
Discharge
<4 sec @ 12” (typ); measured in-line from center of the fan (±1000V-100V)
Balance
±3V or better @ 12” (30.5 cm) away
Warning Setpoint: +3.5V (±0.5V), -3.5V (±0.5V)
Alarm Setpoint: +5.0V (±0.5V), -5.0V (±0.5V)
Cleanroom Class
ISO 14644-1 Class 5
Dimensions
4.33”H x 3.15”W x 1.6”D (11.0 x 8.0 x 4.07 cm) without bracket
Weight
0.55 lb (0.25 kg)
Download datasheet
Model 5832 Benchtop Ionizing Blower
Model 5832 Benchtop Ionizing Blower
Simco-Ion's Model 5832 Blower provides reliable, fast static charge control for benchtop work areas and small spaces, allowing optimal electrostatics management that minimizes cost and maximizes protection for ESD-sensitive areas View Detail
Model 5822i In-tool Ionizing Blower
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