Ambient Air Static Charge Control in Tight Spaces for Process Tool

Simco-Ion’s QuadBar 4630 Ionizer is the first corona ionizer to provide safe, effective static charge control in the ambient air inside a process chamber. Its unique quadropole configuration ensures effective ionization as close as 3 inches (7.6 cm) from the product. The 4630’s compact size is designed to fit easily into the tight confines of any process equipment, and its ability to run on 24 VDC input power means it can connect to a tool’s power source. 

Controller Model 4030

Simco-Ion Model 4030 QuadBar Controller is a convenient solution for powering and monitoring up to 16 QuadBars and 2 AeroBar Model 5685 ionizers for optional AeroBar ionization.

TARGET MARKETS

• Back-End Semiconductor Processing
• Front-End Semiconductor Manufacturing

TARGET APPLICATIONS

 QuadBar Model 4630 Ionizers placed above and below the handling robot accelerate discharge times on the front and back wafer surfaces, regardless of airflow.

• Quadropole configuration with IsoStat® Technology
• Compact size
• 24 VAC or 24 VDC operation
• Available with Single-crystal Silicon emitter points
• Alarm output to FMS or process tool controller