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Cleanroom Compatible for High Ion Output for Fast Neutralization
Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Interface Module Model 5200-IM6T
Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.
AeroBar® 5225 In-tool Ionizing System
Specifications
Voltage
Input: 24 VAC, 50/60 Hz, 1W (typ); powered by Interface Module Model 5200-IM6T Output: 0-20 kVDC, ±10% for each polarity on an individual AeroBar; positive or negative output levels can be adjusted separately through GUI
Ion Emission
Pulsed DC, Steady-state DC, or Standby
Emitter
Single-crystal Silicon, replaceable
Cleanroom Class
ISO 14644-1 Class 1 (Single-crystal Silicon emitter) ISO 14644-1 Class 3 (Titanium emitter)
Dimension
2.1”H x 1.2”W x 22.4 / 28.4 / 35.7 / 44.4 / 55.6 / 64.4 / 75.5 / 84.4”L (5.3 x 3.1 x 56.9 / 72.1 / 90.7 / 112.8 / 141.2, 163.6 / 191.8 / 214.4 cm)
Weight
1.13 lb (0.51 kg) for a 22” (55.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30.5 cm)
Interface Module Model 5200-IM6T
Input Voltage
24 VDC, 1.0A, ±5%
Capacity
Connect to up to six Model 5225 AeroBars
LED Indicator
Green POWER ON, yellow COMMUNICATION, red ALARM
Dimension
2.76”H x 2.88”W x 12.4”L (7.01 x 7.32 x 31.5 cm) with flange
Weight
2.6 lb (1.18 kg)
Download datasheet
AeroBar® 5225S
AeroBar® 5225S
Simco-Ion’s Standalone Digital AeroBar Model 5225S ionizing bar is specifically designed to provide high performance with simple integration and operation. Adjustable and precise, easy-to-use digital settings allow the AeroBar to be used in a multitude of applications, ranging from inside tools to workstations and cleanroom areas View Detail
AeroBar® 5645
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