Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization

Simco-Ion's Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required, but exposed metallic surfaces are not permitted. The AeroBar utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

• ISO 14644-12 (0.01 µm particles) ionization and
  ISO 14644 Class 1 (0.1 µm particles) cleanliness
• Modulated pulse technology
• Metal-free design “M”
• Excellent lateral uniformity
• Low field voltages
• Air-assist capability
• Optional software with easy-to-use interface with wide adjustability
• Alarm output signal

TARGET APPLICATIONS

AeroBar 5635M is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries along with environments that need to be metal free. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.